J-15JMicroscopesMicroscope lineups that systemize observation, measurement and processingMitutoyo operates a policy of continuous improvement that aims to provide the customer with the benet of the latest technological advances.Therefore the company reserves the right to change any or all aspects of any product specication without notice.Hyper MF/MF-USERIES 176 — High-Accuracy Measuring Microscopes•Ultimate automated world's highest accuracy Measuring Microscope (Minimum display Resolution0.01um).•The front-operation design of the main unit is based on the concept of UD (universal design).•Three-axis motorized front operation joystick control, which makes a refreshing change from conventional microscope operation, allows ne positioning even during fast movement.•User selection of a conventional microscope optical tube or one equipped with built-in laser AF has improved measurement throughput due to the diversied observation methods available.•Large workstage with stroke of 250×150mm provides enough margin for the measurement of larger workpieces. •Utilizes ultra-high-precision glass scales with low thermal expansion and a detector head with high resolution.•The best-selling data processing unit, QM-Data200, and the Vision Unit can be integrated to provide an effective and stable measurement environment.•A wafer holder (available for wafers of less than 8”) and high rigidity center supports meet the needs for high precision measurement. •Motorized turret models are equipped with a retracting function that works when the objective lens is changed.SPECIFICATIONSModel No.HyperMF-B2515BHyperMF-UB2515BHyperMF-UD2515BHyperMF-UE2515BHyperMF-UF2515BOrder No. 176-430*1 176-431*1 176-432*1 176-433*1 176-434*1Optical tubeFinite correction optical system—Infinity-correction optical systemBF (Bright field)Infinity-correction optical systemBD (Bright / Dark field)Infinity-correction optical systemBF (Bright field) with the LAF functionInfinity-correction optical systemBD (Bright / Dark field) with the LAF functionStandard reticle (Built-in)90° broken-cross line (line width 5μm)Pupil distance adjustmentSiedentopf type Adjustment range: 51 to 76mmOptical path switching ratioObservation/TVphotomicrography = 50/50Vertical tilt angle25°TiltingTV portProvided as standardObservation imageErect imageEyepieceMagnification10X, 15X, 20XObjective lens (optional)Selectable from the monocular unit (equipped with an eyepiece) or binocular tube (equipped with two eyepieces)Equipped with two 10X eyepiecesML series objective lens1X, 3X, 5X, 10X, 20X, 50X, 100X — BF (Bright field)—M Plan Apo, M plan Apo SL, G plan ApoBD (Bright / Dark field)—BD Plan Apo, BD Plan Apo SLTurret (optional)BF (Bright field)—(Equipped with a four-hole manual sensor / motorized five-hole sensor*2)BD (Bright / Dark field)—(Equipped with a four-hole manual sensor / motorized four-hole sensor*3)Focusing sectionMaximum height of workpiece150mmMeasuring accuracy(1.5+0.01L) μm L: Measuring length (mm)Drive methodMotorized control with the use of a joystickIllumination unitTransmitted illumination deviceTelecentric system, Built-in aperture diaphragm, Halogen bulb (12V, 50W), 100-step light intensity control, Fiber optics cable cold light illuminationReflected illumination unit Koehler illumination, Variable aperture diaphragm mechanism, Halogen bulb (12V, 100W), 100-step light intensity control, Fiber optics cable cold light illuminationWorkstageMeasuring range (X×Y)250×150mmMeasuring accuracy*4 (When no load is put on the X- or Y-axis)(0.9+0.003L) μm L: Measuring length (mm)Dimensions of the top plane460×350mmUsable dimensions of the stage glass 300×200mmSwiveling angle ±3°Maximum loading mass30kgDrive methodMotorized control with the use of a joystickDetectorHigh precision digital scale (Patented)Digital displayResolution0.01μmAxes to be displayedX, Y, ZData processing unitQM-Data200 or Vision UnitOperation sectionJoystick lockAvailableFine pitchAvailableData outputAvailableDigital display resetAvailableIllumination light intensity control:AvailableLAF (just focus)——AvailableLAF (tracking focus)——AvailableTurret remote control—Available (when installing a motorized turret)*1: To denote your AC power cable add the following sufxes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No sufx are required for PSE.*2 and *3 are the factory-installed options.*4: Measurement accuracy complies with JIS B7153.Hyper MF-U•An optical tube, turret, and objective lens are optional.Refer to the Hyper MF/MF-U (Catalog No.E14012) for more details.For replacement for reflected illumination (from separate light source)Standard: Halogen bulb (12V, 100W) (No.517181)High-intensity bulb (12V, 100W) (No.12BAD602)Bulb replacement for transmitted/reflected illumination Standard: Halogen bulb (12V, 50W) (No.02APA527)


page 536