MEASURING INSTRUMENTS CATALOG No.E2019
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J-14JMitutoyo reserves the right to change any or all aspects of any product specication, including prices, designs and service content, without notice.WIDE VMU-VWIDE VMU-HWIDE VMU-BDVWIDE VMU-BDHVMU SERIES 378 — Video Microscope Unit•Compact and lightweight microscope designed to be built in for camera observation•A versatile microscope head typically used as an OEM product suitable for tting to specialist machines, such as those designed for inspection and repair of semiconductor wafers using YAG (near-infrared, visible, near-ultraviolet, or ultraviolet) laser *1.*1 The performance and safety of laser-equipped system products is not guaranteed.•For VMU-LB and VMU-L4B, the rigidity and general performance of the microscope main unit have been enhanced compared with previous models.•Applications *2: internal observation of silicon systems, spectral characteristics analysis using infrared, etc.*2 An infrared source and infrared camera are necessary.•Telecentric system equipped with an aperture diaphragm is standard on the reected illumination optical system. Best suited to process images for which uniform illumination is required.•Design and manufacture are exible to meet your demands such as double camera mounting or double (low/high) magnication.SPECIFICATIONSModel No.VMU-VVMU-HVMU-LBVMU-L4BOrder No.378-505378-506378-513378-514Camera mounting directionVerticalHorizontalVertical (Rotatable)ObservationBright-field/Erect imageBright-field/Inverted imageBright-field/Erect imageOptical tubeTV adapterEquipped with a C-mountEquipped with a C-mount (Equipped with a green filter switching mechanism) Image forming (tube) lensBuilt-in 1X (visible/near-infrared calibration)Built-in 1X (near-infrared/visible/near-ultraviolet calibration)Built-in 1X (visible/ultraviolet)Available for lasers—YAG laser source(Fundamental, Second/Third harmonic) mountableYAG laser source(Second/Third/Fourth harmonic) mountableObjective lens(required option)For observationM Plan Apo series, M Plan Apo HR series, M Plan Apo SL series, G Plan Apo seriesFor laser processing—M/LCD Plan Apo NIR seriesM/LCD Plan Apo NUV seriesNote: Selected depending on the wavelength of the laser sourceM/LCD Plan Apo NIR seriesM/LCD Plan Apo NUV seriesM/LCD Plan UV seriesNote: Selected depending on the wavelength of the laser sourceApplicable camera(s)2/3 type or less cameras (C-mount type) Reflected illumination optical systemTelecentric system equipped with an aperture diaphragmIllumination unit (optional)Fiber-optic cable illumination unit (12 V, 100 W) (378-700*)/(15 V, 150 W) (176-316*)Main unit weight650 g750 g1270 g1300 gNote1: Besides the models shown above, products equipped with a compact Koehler illumination system intended for general observation are also available.Note2: The M Plan Apo 1X objective lens is used with the polarization unit (378-710 or 378-715).* Order numbers differ depending on the power supply cord.VMU-VVMU-HVMU-LBVMU-L4BRefer to the Microscope Units and ObjectivesBrochure (No. E14020) for more details.WIDE VMU SERIES 378 — Wide-field Video Microscope Unit• Wide-FOV video microscope unit for Bright/Dark-field observation.• Incorporates a wide-field image sensor (APS-C format or smaller size) providing seven times greater viewing area than the VMU Series for greatly enhanced inspection efficiency.• In addition to normal bright-field observation, this series supports dark-field observation for scratch inspection, etc., and polarized light observation for increased contrast when viewing certain specimens.• Bulk inspections covering a wide area can be performed with multiple units in a high-density configuration. SPECIFICATIONSFor Bright-field ObservationFor Bright/Dark-field ObservationModel No.WIDE VMU-VWIDE VMU-HWIDE VMU-BDVWIDE VMU-BDHOrder No.378-515378-516378-517378-518Camera mounting orientationVerticalHorizontalVerticalHorizontalObservationBright-field/Erect imageBright-field/Inverted imageBright/Dark-field/Erect imageBright/Dark-field/Inverted imageOptical tubeOptical systemMagnification: 1X Visible lightCamera MountF-Mount, C-Mount (with aligning and parfocal adjustment mechanism) Imaging forming (tube) lensBuilt-in 1X tube lens (Correcting wavelength range: 436 to 656 nm) Image fieldø30Polarized unit*MountableObjective lens (required option)M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan ApoBD Plan Apo, BD Plan Apo HR, BD Plan Apo SLApplicable cameraAPS-C format or smaller sizeReflected illumination optical systemTelecentric illumination, Bright-field illumination optical tube (Single-port fiber-optic illumination)Telecentric illumination, Bright/Dark-field illumination optical tube (Dual-port fiber-optic illumination)Bright/Dark-field switching with light source on-offIllumination unit (optional)Fiber-optic illumination unit (12 V, 100 W) (378-700)/(15 V, 150 W) (176-316)Main unit mass1800 g1950 g2000 g2150 g* Polarized observation by Bright-field illuminationImage sensorMounting WIDE VMU-V and WIDE VMU-H units alternately prevents interference between image sensors.Optical fiber for dark-field illuminationOptical fiber for bright-field illuminationImage sensorVMUWIDE VMU×7WIDE VMU dark-field

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