K-19KVision Measuring SystemsVision measuring systems for multipurpose useMitutoyo operates a policy of continuous improvement that aims to provide the customer with the benet of the latest technological advances.Therefore the company reserves the right to change any or all aspects of any product specication without notice.Micro Form Measuring SystemM-NanoCoordM-NanoCoord(high-accuracy 2 axes stage)Ultra-low measuring force scanning probeContact type sensorUltrasonic touch probe with micro diameterZ-axis resolution: 0.25nmMeasuring force: 10µN to 750µNStylus diameter: dia. 30µm (UMAP103)Repeatability: 3σ = 0.1µmVision headHigh accuracy optical systemPattern focus function3-step power turretFigure 1: M-NanoCoord system block diagram•M-NanoCoord is an ultra-high accuracy measuring system developed to target the eld of micro measurement.•The M-NanoCoord consists of the measuring stage of an XY-plane guiding structure, a vision head that observes and positions measuring points, and a highly sensitive measuring sensor for assessing micro forms. The M-NanoCoord is equipped with the same vision head (including illumination systems) as the Quick Vision series, so the M-NanoCoord can also be used as an ultra-high accuracy CNC vision measuring machine.•Any one of the sensors shown in Figure 1 below is mountable to suit the application.SPECIFICATIONSItemsSpecicationsMain unitStructureXY-plane guiding structureGuide systemHydrostatic air bearingMeasuring range (X×Y×Z)200×200×100mmScalesLow expansion laser holoscaleResolution1nmAccuracyE1 = (0.2+L/1000)μmSensor sectionSensor to be selected1Ultrasonic micro probeUMAPStylusUMAP101: ø15μm, length 0.2mmUMAP103: ø30μm, length 2mmUMAP107: ø70μm, length 5mmUMAP110: ø100μm, length 10mmUMAP130: ø300μm, length 16mmRepeatabilityσ = 0.1μm2Wide range nano probeLNPMeasuring range20mmResolution0.25nmIndication accuracy(0.05+3.8H/20)μm H = height [mm]Measuring force10 to 750μNTraceable angleTracing measurement: max. 80°Touch measurement: max. 90°Note: Applies to a ruby ball stylusStylus1) Diamond: tip radius 2μm2) Ruby ball: ø0.3mmCommon sensorVision head (power turret, programmable ring light illumination, megapixel camera)


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