L-30LMitutoyo operates a policy of continuous improvement that aims to provide the customer with the benet of the latest technological advances.Therefore the company reserves the right to change any or all aspects of any product specication without notice.Formtracer Extreme CS-5000CNC/CS-H5000CNCSERIES 525 — CNC Surface Roughness and Contour Measuring SystemsWide range detector employing active control technologyCS-H5000CNC(with Y-axis table)•High-accuracy stylus type CNC Surface Measuring System that allows batch measurement of surface roughness and form/contour.• The X1- and Z2-axes have maximum drive speeds of 40mm/s and 200mm/s, respectively. This permits high-speed positioning that can potentially result in a large increase in the throughput of multiple-prole / multiple-workpiece measurement tasks.• A Mitutoyo Laser Holoscale is incorporated in the X1- and Z1-axes so that high resolution is achieved and batch measurement of form/contour and surface roughness can be made.• The active control method is employed for the Z1-axis detector to implement a wide-range measurement capability wherein the variation in dynamic measuring force is restricted.• Since the Z1-axis detector incorporates an anti-collision safety device, the machine will automatically stop if the detector touches a workpiece or jig.• For models with the axis, it is possible to perform continuous measurement over horizontal and inclined surfaces by power-tilting the X1 axis. (CS-5000CNC only)• For models with the Y-axis table, it is possible to expand the measuring range for multiple workpieces, etc., through positioning in the Y-axis direction.• Optional external control function (Ext I/O) through bidirectional communication (RS-232C) with the PLC (programmable logic controller) is available.SPECIFICATIONSModel No.CS-5000CNCCS-H5000CNCX1 axisMeasuring range200mmResolution0.00625 µmScale typeLaser HoloscaleDrive speedCNC modeMax. 40mm/sJoystick mode0 to 40mm/sMeasuring speed0.02, 0.05, 0.1, 0.2mm/s (surface roughness), 0.02, 0.05, 0.1, 0.2, 0.5, 1.0, 2.0mm/s (form/contour)Measuring directionForward / backward Straightness(with standard stylus)(0.1+0.0015L)μm L: traverse length (mm)(0.05+0.0003L)μm L: traverse length (mm)(with 2X-long stylus)(0.2+0.0015L)μm L: traverse length (mm) (0.1+0.0015L)μm L: traverse length (mm)Accuracy (20°C)±(0.3+0.002L)µm L: traverse length (mm)±(0.16+0.001L)µm L: traverse length (mm)Z1 axis(Detector)Measuring range(with standard stylus)12mm(with 2X-long stylus)24mmResolution(with standard stylus)0.0008 µm(with 2X-long stylus)0.0016 µmVertical movement of the stylusArc motionScale typeTransmission-type linear encoder Accuracy (20°C)±(0.3+|0.02H|)µm H: probing height (mm)±(0.07+|0.02H|)µm H: probing height (mm)Measuring force(with standard stylus)4mN (Fixed)(with 2X-long stylus)0.75mN (Fixed)Traceable angleAscent: 60°, Descent: 60°, (Depends on the surface texture.)Stylus tip shapeStandard stylusTip angle: 40°, Tip radius: 5μm, Diamond tipStandard ball stylusTip ball radius: 0.25mm, Sapphire2X-long stylusTip angle: 40°, Tip radius: 5μm, Diamond tip2X-long stylus—Tip angle: 60°, Tip radius: 2μm, Diamond tip2X-long ball stylusTip ball radius: 0.25mm, SapphireFace of stylusDownwardZ2 axis(Column)Travel rangeZ2 axis (column, type S)300mmZ2 axis (column, type H)500mm—Resolution0.05 µmScale typeReective-type linear encoderDrive speedCNC modeMax. 200mm/sJoystick mode0 to 50mm/sBase size (width×depth)750×600mmBase materialGabbroNote: While the appearance of the natural stone measuring table varies according to the source, the high stability for which this material is known can always be relied upon.An inspection certicate is supplied as standard. Refer to page X for details.


page 605