MEASURING INSTRUMENTS CATALOG No.E2016
518/682

H-29HLinear ScalesDesigned to capture positional coordinates from slides on machine tools and precision instruments including semiconductor production equipmentMitutoyo operates a policy of continuous improvement that aims to provide the customer with the benet of the latest technological advances.Therefore the company reserves the right to change any or all aspects of any product specication without notice.•Applies the image correlation of a speckle pattern.•Simultaneous, non-contact measurement of X-Y position.•Nano-resolution measurement.•Suitable for applications such as stage position repeatability.•Capable of measuring slight deformations and ex of parts.Refer to the MICSYS (Catalog No.E13001) for more details.An inspection certicate is supplied as standard. Refer to page X for details.2D Image Correlation EncoderSERIES 549SPECIFICATIONSOrder No.549-701ModelMICSYS-SA1Detection methodLaser speckle image correlationEffective range±100μm (2D)Resolution1nmAccuracy (20°C)±100nmData update frequency20Hz

元のページ 

page 518

※このページを正しく表示するにはFlashPlayer10.2以上が必要です