Figure 1. FEM Analysis of Base (Example) |
|
Figure 2. Detection System |
2-3 Drive Mechanism The center of gravity drive system places the drive units near each carriage's center of gravity for each slide, and thereby improves dynamic accuracy by reducing the moment of inertia during acceleration and deceleration. 2-4 Vibration Control Techniques Internal vibration MITUTOYO uses its proprietary highly rigid low-vibration air bearings to achieve high accuracy and stable guide operation by damping vibration from two main sources of internal vibration: spindle motors and guide rails. External vibration To keep the installation site's floor vibrations from adversely affecting precision, MITUTOYO has placed air-damped spring isolators equipped with an auto-leveling function at the center of gravity position in the base. This technique effectively eliminates external vibration to ensure stable accuracy. 2-5 Probe Technologies The MTP2000 is a touch trigger probe developed for ultra high accuracy measurements. The MPP300 probe enables high precision scanning measurements as well as high precision point measurements. |
|
|
|
Figure 5. LEGEX12128
|
|
Figure 6. Error of Indication Measurement Results for LEGEX12128 |
|
Figure 7. Error of Indication Measurement Results for LEGEX9106 |
Published in "Mechanical Engineer (Japanese only)" by THE NIKKAN KOGYO SHIMBUN, LTD. July, 2004. |