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Using MEMS (Micro Electro Mechanical Systems) technology, MITUTOYO has developed probes that can record incredibly small internal diameter measurements.



UMAP probe / Micro EDM
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Micro EDM (micro electrical discharge machine)
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Equipment with MEMS technology

MEMS technology is being used to develop various types of sensors.


ICP etching equipment (for Si-MEMS)
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Application examples Micro acceleration sensor
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